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- Standard Scanning Acoustic Microscope (SAM)
Standard Scanning Acoustic Microscope (SAM)
The standard ultrasonic scanning microscope is a versatile non-destructive testing system for various power semiconductors and packaging components. Loading and unloading is performed manually, while the system carries out ultrasonic scanning and image analysis automatically. Water tank size and waterproof fixtures can be customized according to product specifications.
Application Range
Delamination inspection of IGBT/SiC modules, delamination inspection of semiconductor chip packages, weld defect inspection of water-cooled heat sinks, diamond thickness measurement, and internal defect detection
Product Advantages
- Non-destructive full inspection: no sample destruction, efficient repeat inspection possible, the test part remains usable
- Wide frequency band 1–500 MHz: low frequency for large penetration depth and deep defects in IGBT modules; high frequency for high resolution and micro-voids in chip packages
- Multi-layer delamination scan: supports up to 1,000 layer scans, suitable for complex multilayer packaging structures
- Multi-head options: single, dual, or quad-head configuration; left/right dual heads double efficiency, quad-head configuration for high throughput
- C+T synchronous scan: one scan simultaneously delivers images in reflection mode (C-SAM) and transmission mode (SAT)
- Low-vibration granite platform, linear motor gantry with dual drive; scan precision and speed surpass conventional linear guide/spindle systems
Technical Specifications
| Parameter | Specification |
| Overall Dimensions | 1,070 mm × 950 mm × 1,500 mm |
| Effective Scan Area | 400 mm × 320 mm (customizable) |
| Maximum Scan Speed | 1,000 mm/s |
| Recommended Image Resolution | 1 ~ 4,000 μm/pixel |
| Ultrasonic Transmit/Receive Bandwidth | 1 ~ 500 MHz |
| Three-Axis Platform | Granite platform, X/Y-axis linear motors, dual-drive gantry |
| Probe Configuration | Single, dual, or quad-head configuration (optional) |
| Scan Mode | C-scan, B-scan, A-scan; supports C+T synchronous scan |
| Water Supply & Drainage System | Pressure water inlet, gravity drainage, optional pump drainage |
| Waterproof Fixture | Waterproof fixtures customizable according to product specification |
The semi-automatic SAM is designed for the testing of a wide range of small and medium-sized series, as well as for use in production quality assurance. Automated testing processes enable the reproducible and efficient examination of defined component areas.
