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- Semi-Automatic Scanning Acoustic Microscope (SAM)
Semi-Automatic Scanning Acoustic Microscope (SAM)
The semi-automatic ultrasonic scanning microscope extends the standard model with a bilateral automatic water immersion mechanism. It retains the flexibility of manual loading and unloading while reducing operational steps and reliance on operator expertise through automated immersion/emersion, automatic scanning, and automatic data processing. It is suitable for R&D validation and production sampling inspections with varying sample types, and represents a cost-effective automation upgrade over the standard offline system.
Application Range
Semiconductor packaging inspection for high-mix low-to-medium volume production, R&D process validation, and production quality sampling inspection
Product Advantages
- Bilateral automatic water immersion: carriers on both sides can immerse automatically, independently or coupled; prevents wet hands and improves operability
- Angled immersion design: the carrier enters the water tank at an angle, effectively removing air bubbles and preventing scan imaging interference
- Dual-head/dual-station design: two carriers are scanned simultaneously, significantly increasing inspection efficiency compared to a single station
- Quick-change carriers: supports rapid changeover of different workpieces, suitable for high-mix mixed inspection
- Optional C/T scans: front C-scan and rear T-scan can be configured for synchronous image output; dual-mode results in one scan
- Higher automation level than the standard offline system and lower initial investment than a fully automatic inline system; suitable for flexible production requirements
Technical Specifications
| Parameter | Specification |
| Overall Dimensions | 970 mm × 1,725 mm × 1,845 mm |
| Water Tank Dimensions | 650 mm × 1,500 mm × 150 mm (customizable) |
| Effective Scan Area | approx. 400 mm × 320 mm (total) |
| Maximum Scan Speed | 2,000 mm/s |
| X-Axis Acceleration | 2 g (manually or automatically adjustable) |
| Z-Axis Stroke | 0 ~ 100 mm |
| Probe Configuration | 1 or 2 C-scan probes, supports 5–500 MHz probes |
The standard SAM is suitable for the nondestructive testing and detailed analysis of semiconductors, power electronics, and electronic packages. Typical applications include the delamination testing of IGBT and SiC modules, the examination of semiconductor packages, and the analysis of internal defects and connections.
